Inventor

BUCHANAN KEITH EDWARD

GB5 patents

⚠️ This page may combine multiple inventors who share the name “BUCHANAN KEITH EDWARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TRIKON HOLDINGS LTD

2 patents

US6660140B2Dec 9, 2003

Sputtering apparatus

TRIKON HOLDINGS LTD8 citations70

US6179974B1Jan 30, 2001

Apparatus and methods for sputtering

TRIKON HOLDINGS LTD7 citations70

TRIKON EQUIP LTD

1 patent

US6174823B1Jan 16, 2001

Methods of forming a barrier layer

TRIKON EQUIP LTD16 citations78

TRIKON TECHNOLOGIES LTD

1 patent

US6933246B2Aug 23, 2005

Dielectric film

TRIKON TECHNOLOGIES LTD10 citations68

AVIZA EUROP LTD

1 patent

US7199474B2Apr 3, 2007

Damascene structure with integral etch stop layer

AVIZA EUROP LTD7 citations67