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Inventor
YEOH JOON-CHAI
GB
2 patents
⚠️ This page may combine multiple inventors who share the name “YEOH JOON-CHAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TRIKON TECHNOLOGIES LTD
1 patent
US6933246B2
Aug 23, 2005
Dielectric film
TRIKON TECHNOLOGIES LTD
10 citations
68
AVIZA EUROP LTD
1 patent
US7199474B2
Apr 3, 2007
Damascene structure with integral etch stop layer
AVIZA EUROP LTD
7 citations
67