Inventor
MULKENS JOHANNES CATHARINUS HU
NL36 patents
Patents
36 patentsUS7593092B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV60 citations99
US7388648B2Jun 17, 2008
Lithographic projection apparatus
ASML NETHERLANDS BV136 citations99
US7213963B2May 8, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV196 citations99
US7199858B2Apr 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV409 citations99
US7193232B2Mar 20, 2007
Lithographic apparatus and device manufacturing method with substrate measurement not through liquid
ASML NETHERLANDS BV216 citations99
US7075616B2Jul 11, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV366 citations99
US6952253B2Oct 4, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1,825 citations99
US7372541B2May 13, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV74 citations98
US7352434B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV178 citations98
US7224436B2May 29, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV110 citations98
US7110081B2Sep 19, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV128 citations98
US7038760B2May 2, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV78 citations98
US6741331B2May 25, 2004
Lithographic apparatus with improved exposure area focus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV72 citations97
US7411653B2Aug 12, 2008
Lithographic apparatus
ASML NETHERLANDS BV49 citations96
US7057702B2Jun 6, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV89 citations96
US7483118B2Jan 27, 2009
Lithographic projection apparatus and device manufacturing method
ASML NETHERLANDS BV25 citations93
US7324185B2Jan 29, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV18 citations93
US7196770B2Mar 27, 2007
Prewetting of substrate before immersion exposure
ASML NETHERLANDS BV18 citations93
US6538716B2Mar 25, 2003
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV24 citations92
US7352435B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV26 citations91
US7245353B2Jul 17, 2007
Lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV38 citations91
US7245355B2Jul 17, 2007
Lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV35 citations91
US6819405B2Nov 16, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV35 citations91
US7193681B2Mar 20, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV18 citations84
US7175968B2Feb 13, 2007
Lithographic apparatus, device manufacturing method and a substrate
ASML NETHERLANDS BV15 citations84
US7224431B2May 29, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations82
US7368744B2May 6, 2008
Photon sieve for optical systems in micro-lithography
ASML NETHERLANDS BV7 citations74
US7161654B2Jan 9, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations74
US7034917B2Apr 25, 2006
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV9 citations74
US6753946B2Jun 22, 2004
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations74
US7379159B2May 27, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations63
US7375796B2May 20, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations63
US7248334B2Jul 24, 2007
Sensor shield
ASML NETHERLANDS BV2 citations63
US7110087B2Sep 19, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations63
US6700646B2Mar 2, 2004
Lithographic apparatus, method of manufacturing a device, and device manufactured thereby
ASML NETHERLANDS BV4 citations63
US7283208B2Oct 16, 2007
Lithographic apparatus, method of manufacturing a device, and device manufactured thereby
ASML NETHERLANDS BV0 citations50