Inventor
SCHEDEL THORSTEN
DE15 patents
⚠️ This page may combine multiple inventors who share the name “SCHEDEL THORSTEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
8 patentsUS6684124B2Jan 27, 2004
Method for controlling a processing device for a sequential processing of semiconductor wafers
INFINEON TECHNOLOGIES AG40 citations92
US6908775B2Jun 21, 2005
Method for performing an alignment measurement of two patterns in different layers on a semiconductor wafer
INFINEON TECHNOLOGIES AG20 citations91
US6861331B2Mar 1, 2005
Method for aligning and exposing a semiconductor wafer
INFINEON TECHNOLOGIES AG7 citations71
US6979522B2Dec 27, 2005
Method for exposing at least one or at least two semiconductor wafers
INFINEON TECHNOLOGIES AG3 citations62
US6780552B2Aug 24, 2004
Method for controlling the quality of a lithographic structuring step
INFINEON TECHNOLOGIES AG5 citations61
US7304716B2Dec 4, 2007
Method for purging an optical lens
INFINEON TECHNOLOGIES AG6 citations57
US7186484B2Mar 6, 2007
Method for determining the relative positional accuracy of two structure elements on a wafer
INFINEON TECHNOLOGIES AG3 citations55
US7248365B2Jul 24, 2007
Method for adjusting a substrate in an appliance for carrying out exposure
INFINEON TECHNOLOGIES AG1 citations50
INFINEON TECHNOLOGIES SC300
3 patentsUS6593254B2Jul 15, 2003
Method for clamping a semiconductor device in a manufacturing process
INFINEON TECHNOLOGIES SC3009 citations67
US6887722B2May 3, 2005
Method for exposing a semiconductor wafer
INFINEON TECHNOLOGIES SC3006 citations58
US6806008B2Oct 19, 2004
Method for adjusting a temperature in a resist process
INFINEON TECHNOLOGIES SC3006 citations58