Inventor
KANAOKA MASASHI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “KANAOKA MASASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SOKUDO CO LTD
4 patentsUS7497633B2Mar 3, 2009
Substrate processing apparatus and substrate processing method
SOKUDO CO LTD42 citations92
US8034190B2Oct 11, 2011
Substrate processing apparatus and substrate processing method
SOKUDO CO LTD22 citations91
US7604424B2Oct 20, 2009
Substrate processing apparatus
SOKUDO CO LTD29 citations90
US8040488B2Oct 18, 2011
Substrate processing apparatus
SOKUDO CO LTD3 citations61
KANEYAMA KOJI
3 patentsMIYAGI TADASHI
3 patentsUS8894775B2Nov 25, 2014
Substrate processing apparatus and substrate processing method
MIYAGI TADASHI3 citations61
US8218124B2Jul 10, 2012
Substrate processing apparatus with multi-speed drying having rinse liquid supplier that moves from center of rotated substrate to its periphery and stops temporarily so that a drying core can form
MIYAGI TADASHI2 citations61
US10134610B2Nov 20, 2018
Substrate processing method for drying a substrate by discharging gas to liquid layer on the substrate while rotating the substrate
MIYAGI TADASHI0 citations40