Inventor
SHIGEMORI KAZUHITO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “SHIGEMORI KAZUHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
3 patentsSOKUDO CO LTD
3 patentsKANEYAMA KOJI
3 patentsMIYAGI TADASHI
3 patentsUS8894775B2Nov 25, 2014
Substrate processing apparatus and substrate processing method
MIYAGI TADASHI3 citations61
US8218124B2Jul 10, 2012
Substrate processing apparatus with multi-speed drying having rinse liquid supplier that moves from center of rotated substrate to its periphery and stops temporarily so that a drying core can form
MIYAGI TADASHI2 citations61
US10134610B2Nov 20, 2018
Substrate processing method for drying a substrate by discharging gas to liquid layer on the substrate while rotating the substrate
MIYAGI TADASHI0 citations40