Inventor
ZHANG PENGYI
US13 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG PENGYI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS10566194B2Feb 18, 2020
Selective deposition of etch-stop layer for enhanced patterning
LAM RES CORP5 citations82
US11094542B2Aug 17, 2021
Selective deposition of etch-stop layer for enhanced patterning
LAM RES CORP2 citations71
US10643889B2May 5, 2020
Pre-treatment method to improve selectivity in a selective deposition process
LAM RES CORP2 citations71
US10472716B1Nov 12, 2019
Showerhead with air-gapped plenums and overhead isolation gas distributor
LAM RES CORP4 citations69
US11869770B2Jan 9, 2024
Selective deposition of etch-stop layer for enhanced patterning
LAM RES CORP0 citations60
US12565701B2Mar 3, 2026
Undercoating coverage and resistance control for ESCS of substrate processing systems
LAM RES CORP0 citations59
US10745806B2Aug 18, 2020
Showerhead with air-gapped plenums and overhead isolation gas distributor
LAM RES CORP0 citations48
SCHERING CORP
5 patentsUS7223861B2May 29, 2007
Process for preparing substituted 5-amino-pyrazolo-[4,3-e]-1,2,4-triazolo-[1,5-c]-pyrimidines
SCHERING CORP5 citations71
US7601833B2Oct 13, 2009
Process for preparing substituted 5-amino-pyrazolo-[4,3-e]-1,2,4-triazolo[1,5-c]pyrimidines
SCHERING CORP2 citations60
US7507822B2Mar 24, 2009
Process for preparing substituted 5-amino-pyrazolo-[4,3-e]-1,2,4-triazolo[1,5-c]pyrimidines
SCHERING CORP2 citations60
US7439361B2Oct 21, 2008
Process for preparing substituted 5-amino-pyrazolo-[4,3-e]-1,2,4-triazolo[1,5-c]pyrimidines
SCHERING CORP1 citations60
US7235659B2Jun 26, 2007
Process for preparing substituted 5-amino-pyrazolo-[4,3-e]-1,2,4-triazolo[1,5-c]pyrimidines
SCHERING CORP1 citations50