Inventor
KROTOV PETER
US7 patents
⚠️ This page may combine multiple inventors who share the name “KROTOV PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS10872787B2Dec 22, 2020
Apparatus for purging semiconductor process chamber slit valve opening
LAM RES CORP0 citations51
US10090174B2Oct 2, 2018
Apparatus for purging semiconductor process chamber slit valve opening
LAM RES CORP1 citations51
US10186448B2Jan 22, 2019
Wafer support pedestal with wafer anti-slip and anti-rotation features
LAM RES CORP0 citations40