Inventor
SMITH COLIN F
US11 patents
⚠️ This page may combine multiple inventors who share the name “SMITH COLIN F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS10023959B2Jul 17, 2018
Anti-transient showerhead
LAM RES CORP20 citations92
US9982341B2May 29, 2018
Modular vaporizer
LAM RES CORP7 citations83
US10494717B2Dec 3, 2019
Anti-transient showerhead
LAM RES CORP13 citations82
US9605346B2Mar 28, 2017
Systems and methods for pressure-based liquid flow control
LAM RES CORP6 citations72
US9453614B2Sep 27, 2016
Systems and methods for cooling and removing reactants from a substrate processing chamber
LAM RES CORP4 citations72
US10107490B2Oct 23, 2018
Configurable liquid precursor vaporizer
LAM RES CORP0 citations39
US9863041B2Jan 9, 2018
Internally heated porous filter for defect reduction with liquid or solid precursors
LAM RES CORP0 citations39
NOVELLUS SYSTEMS INC
3 patentsUS7993457B1Aug 9, 2011
Deposition sub-chamber with variable flow
NOVELLUS SYSTEMS INC442 citations97
US7737035B1Jun 15, 2010
Dual seal deposition process chamber and process
NOVELLUS SYSTEMS INC472 citations97
US6758591B1Jul 6, 2004
Mixing of materials in an integrated circuit manufacturing equipment
NOVELLUS SYSTEMS INC16 citations82