Inventor

TEN HOOPEN DERK

NL2 patents

Patents

2 patents

US9977349B2May 22, 2018

Support device, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations65

US11835106B2Dec 5, 2023

Method for manufacturing damper device, lithographic apparatus, projection system, and device manufacturing method

ASML NETHERLANDS BV0 citations41