Inventor
TIMANS PAUL JANIS
US26 patents
⚠️ This page may combine multiple inventors who share the name “TIMANS PAUL JANIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
17 patentsUS7015422B2Mar 21, 2006
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
MATTSON TECH INC98 citations99
US6835914B2Dec 28, 2004
Apparatus and method for reducing stray light in substrate processing chambers
MATTSON TECH INC52 citations96
US6717158B1Apr 6, 2004
Heating device for heating semiconductor wafers in thermal processing chambers
MATTSON TECH INC74 citations95
US7269343B2Sep 11, 2007
Heating configuration for use in thermal processing chambers
MATTSON TECH INC37 citations94
US6970644B2Nov 29, 2005
Heating configuration for use in thermal processing chambers
MATTSON TECH INC52 citations94
US7957926B2Jun 7, 2011
System and process for calibrating pyrometers in thermal processing chambers
MATTSON TECH INC11 citations92
US7847218B2Dec 7, 2010
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
MATTSON TECH INC13 citations92
US7745762B2Jun 29, 2010
Optimizing the thermal budget during a pulsed heating process
MATTSON TECH INC19 citations92
US7734439B2Jun 8, 2010
System and process for calibrating pyrometers in thermal processing chambers
MATTSON TECH INC26 citations92
US7543981B2Jun 9, 2009
Methods for determining wafer temperature
MATTSON TECH INC29 citations92
US7453051B2Nov 18, 2008
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
MATTSON TECH INC20 citations92
US7358462B2Apr 15, 2008
Apparatus and method for reducing stray light in substrate processing chambers
MATTSON TECH INC23 citations92
US7135656B2Nov 14, 2006
Apparatus and method for reducing stray light in substrate processing chambers
MATTSON TECH INC33 citations92
US7949237B2May 24, 2011
Heating configuration for use in thermal processing chambers
MATTSON TECH INC17 citations90
US10190915B2Jan 29, 2019
System and process for calibrating pyrometers in thermal processing chambers
MATTSON TECH INC4 citations84
US8918303B2Dec 23, 2014
System and process for calibrating pyrometers in thermal processing chambers
MATTSON TECH INC6 citations84
US7976216B2Jul 12, 2011
Determining the temperature of silicon at high temperatures
MATTSON TECH INC9 citations84
TIMANS PAUL JANIS
7 patentsUS8296091B2Oct 23, 2012
System and process for calibrating pyrometers in thermal processing chambers
TIMANS PAUL JANIS17 citations92
US8696197B2Apr 15, 2014
Method and system for determining optical properties of semiconductor wafers
TIMANS PAUL JANIS7 citations84
US8668383B2Mar 11, 2014
Methods for determining wafer temperature
TIMANS PAUL JANIS13 citations84
US8669496B2Mar 11, 2014
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
TIMANS PAUL JANIS4 citations84
US8222570B2Jul 17, 2012
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
TIMANS PAUL JANIS8 citations84
US8157439B2Apr 17, 2012
Methods for determining wafer temperature
TIMANS PAUL JANIS9 citations84
US8152365B2Apr 10, 2012
Method and system for determining optical properties of semiconductor wafers
TIMANS PAUL JANIS12 citations84