Inventor
DISTASO DANIEL
US13 patents
⚠️ This page may combine multiple inventors who share the name “DISTASO DANIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
5 patentsUS6777686B2Aug 17, 2004
Control system for indirectly heated cathode ion source
VARIAN SEMICONDUCTOR EQUIPMENT61 citations96
US7138768B2Nov 21, 2006
Indirectly heated cathode ion source
VARIAN SEMICONDUCTOR EQUIPMENT49 citations89
US7878145B2Feb 1, 2011
Monitoring plasma ion implantation systems for fault detection and process control
VARIAN SEMICONDUCTOR EQUIPMENT7 citations80
US9118001B2Aug 25, 2015
Techniques for treating sidewalls of patterned structures using angled ion treatment
VARIAN SEMICONDUCTOR EQUIPMENT4 citations73
US9336998B2May 10, 2016
Apparatus and method for dynamic control of ion beam energy and angle
VARIAN SEMICONDUCTOR EQUIPMENT3 citations71
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
3 patentsUS10081861B2Sep 25, 2018
Selective processing of a workpiece
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations72
US10290470B2May 14, 2019
Negative ribbon ion beams from pulsed plasmas
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51
US9734991B2Aug 15, 2017
Negative ribbon ion beams from pulsed plasmas
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations51