Inventor

YAKSHIN ANDREY E

NL8 patents

⚠️ This page may combine multiple inventors who share the name “YAKSHIN ANDREY E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

US7172788B2Feb 6, 2007

Optical element and method for its manufacture as well as lithography apparatus and method for manufacturing a semiconductor device

ZEISS CARL SMT AG19 citations89

US7261957B2Aug 28, 2007

Multilayer system with protecting layer system and production method

ZEISS CARL SMT AG21 citations86

ZEISS STIFTUNG

2 patents

US6656575B2Dec 2, 2003

Multilayer system with protecting layer system and production method

ZEISS STIFTUNG33 citations89

US6483597B2Nov 19, 2002

Method for the production of multi-layer systems

ZEISS STIFTUNG3 citations61

YAKSHIN ANDREY E

2 patents

US8144830B2Mar 27, 2012

Reflective optical element for EUV lithography device

YAKSHIN ANDREY E10 citations73

US8475635B2Jul 2, 2013

Processes and device for the deposition of films on substrates

YAKSHIN ANDREY E0 citations43

ZEISS CARL SMT GMBH

2 patents

US10916356B2Feb 9, 2021

Reflective optical element

ZEISS CARL SMT GMBH0 citations49

US8025777B2Sep 27, 2011

Processes and device for the deposition of films on substrates

ZEISS CARL SMT GMBH0 citations46