Inventor

KAWAGOE YUU

JP2 patents

Patents

2 patents

US12012650B2Jun 18, 2024

Sputtering target and method of producing sputtering target

ULVAC INC0 citations55

US11049976B2Jun 29, 2021

Thin-film transistor, oxide semiconductor film, and sputtering target

ULVAC INC0 citations54