Inventor

CHIAO CHANG-TAI

TW2 patents

⚠️ This page may combine multiple inventors who share the name “CHIAO CHANG-TAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

1 patent

US5286667AFeb 15, 1994

Modified and robust self-aligning contact process

TAIWAN SEMICONDUCTOR MFG44 citations89

LAM RES CORP

1 patent

US6559049B2May 6, 2003

All dual damascene oxide etch process steps in one confined plasma chamber

LAM RES CORP24 citations88