Inventor · disambiguated record

Yung-Wang Lo

Also filed as: LO YUNG-WANG

1 granted patent·28 citations·filing 2005–2005

43Inventor score

Technology areasB24B

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0190US7052374B1Multipurpose slurry delivery arm for chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted May 30, 2006·28 cites·20 claims

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