Inventor
FURUYA HARUHIKO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “FURUYA HARUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS12205800B2Jan 21, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations61
US7368384B2May 6, 2008
Film formation apparatus and method of using the same
TOKYO ELECTRON LTD4 citations61
US7041546B2May 9, 2006
Film forming method for depositing a plurality of high-k dielectric films
TOKYO ELECTRON LTD5 citations60
US12347649B2Jul 1, 2025
Plasma processing apparatus and lid member
TOKYO ELECTRON LTD0 citations50
US12165846B2Dec 10, 2024
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations50
US8778812B2Jul 15, 2014
Apparatus and method of forming thin film including adsorption step and reaction step
TOKYO ELECTRON LTD1 citations47