Inventor
ENOKI YOSHITAKA
JP4 patents
Patents
4 patentsUS11776105B2Oct 3, 2023
Contaminant detection system, contaminant detecting method, and semiconductor manufacturing apparatus
TOKYO ELECTRON LTD1 citations56
US11328901B2May 10, 2022
Deposition method
TOKYO ELECTRON LTD0 citations47
US8778812B2Jul 15, 2014
Apparatus and method of forming thin film including adsorption step and reaction step
TOKYO ELECTRON LTD1 citations47
US12547141B2Feb 10, 2026
Information processing apparatus, storage medium, and restoration support method
TOKYO ELECTRON LTD0 citations43