Inventor
KUMIHASHI TAKAO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “KUMIHASHI TAKAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
17 patentsUS5368685ANov 29, 1994
Dry etching apparatus and method
HITACHI LTD148 citations99
US5242539ASep 7, 1993
Plasma treatment method and apparatus
HITACHI LTD602 citations99
US6057081AMay 2, 2000
Process for manufacturing semiconductor integrated circuit device
HITACHI LTD50 citations96
US5474650ADec 12, 1995
Method and apparatus for dry etching
HITACHI LTD39 citations96
US6497992B1Dec 24, 2002
Process for manufacturing semiconductor integrated circuit device
HITACHI LTD32 citations92
US6479380B2Nov 12, 2002
Semiconductor device and manufacturing method thereof
HITACHI LTD36 citations92
US6562722B2May 13, 2003
Method and apparatus for dry etching
HITACHI LTD11 citations82
US5318667AJun 7, 1994
Method and apparatus for dry etching
HITACHI LTD18 citations82
US6599830B2Jul 29, 2003
Semiconductor device and manufacturing method thereof
HITACHI LTD10 citations74
US6333273B1Dec 25, 2001
Method and apparatus for dry etching
HITACHI LTD6 citations74
US6136721AOct 24, 2000
Method and apparatus for dry etching
HITACHI LTD7 citations74
US6008133ADec 28, 1999
Method and apparatus for dry etching
HITACHI LTD6 citations74
US5795832AAug 18, 1998
Method and apparatus for dry etching
HITACHI LTD5 citations74
US5650038AJul 22, 1997
Method for dry etching
HITACHI LTD6 citations74
US5409562AApr 25, 1995
Dry-etching method and apparatus
HITACHI LTD13 citations74
US5354418AOct 11, 1994
Method for dry etching
HITACHI LTD8 citations74
US7071114B2Jul 4, 2006
Method and apparatus for dry etching
HITACHI LTD0 citations52