Inventor
TSUJIMOTO KAZUNORI
JP32 patents
⚠️ This page may combine multiple inventors who share the name “TSUJIMOTO KAZUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
29 patentsUS5368685ANov 29, 1994
Dry etching apparatus and method
HITACHI LTD148 citations99
US5242539ASep 7, 1993
Plasma treatment method and apparatus
HITACHI LTD602 citations99
US4992136AFeb 12, 1991
Dry etching method
HITACHI LTD259 citations99
US4985114AJan 15, 1991
Dry etching by alternately etching and depositing
HITACHI LTD601 citations99
US4857137AAug 15, 1989
Process for surface treatment
HITACHI LTD520 citations99
US5891252AApr 6, 1999
Plasma processing apparatus
HITACHI LTD60 citations96
US5474650ADec 12, 1995
Method and apparatus for dry etching
HITACHI LTD39 citations96
US6332425B1Dec 25, 2001
Surface treatment method and system
HITACHI LTD16 citations92
US6231777B1May 15, 2001
Surface treatment method and system
HITACHI LTD34 citations92
US6033481AMar 7, 2000
Plasma processing apparatus
HITACHI LTD41 citations92
US5643473AJul 1, 1997
Dry etching method
HITACHI LTD21 citations92
US5270232ADec 14, 1993
Process for fabricating field effect transistor
HITACHI LTD27 citations92
US5147500ASep 15, 1992
Dry etching method
HITACHI LTD32 citations92
US4986877AJan 22, 1991
Method of dry etching
HITACHI LTD37 citations92
US4943344AJul 24, 1990
Etching method
HITACHI LTD41 citations92
US4911812AMar 27, 1990
Plasma treating method and apparatus therefor
HITACHI LTD47 citations90
US4956043ASep 11, 1990
Dry etching apparatus
HITACHI LTD46 citations89
US6562722B2May 13, 2003
Method and apparatus for dry etching
HITACHI LTD11 citations82
US5318667AJun 7, 1994
Method and apparatus for dry etching
HITACHI LTD18 citations82
US6713401B2Mar 30, 2004
Method for manufacturing semiconductor device
HITACHI LTD12 citations74
US6333273B1Dec 25, 2001
Method and apparatus for dry etching
HITACHI LTD6 citations74
US6136721AOct 24, 2000
Method and apparatus for dry etching
HITACHI LTD7 citations74
US6008133ADec 28, 1999
Method and apparatus for dry etching
HITACHI LTD6 citations74
US5795832AAug 18, 1998
Method and apparatus for dry etching
HITACHI LTD5 citations74
US5705029AJan 6, 1998
Dry etching method
HITACHI LTD13 citations74
US5650038AJul 22, 1997
Method for dry etching
HITACHI LTD6 citations74
US5409562AApr 25, 1995
Dry-etching method and apparatus
HITACHI LTD13 citations74
US5354418AOct 11, 1994
Method for dry etching
HITACHI LTD8 citations74
US7071114B2Jul 4, 2006
Method and apparatus for dry etching
HITACHI LTD0 citations52