Inventor
TACHI SHINICHI
JP46 patents
⚠️ This page may combine multiple inventors who share the name “TACHI SHINICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
43 patentsUS6197151B1Mar 6, 2001
Plasma processing apparatus and plasma processing method
HITACHI LTD223 citations99
US5368685ANov 29, 1994
Dry etching apparatus and method
HITACHI LTD148 citations99
US5242539ASep 7, 1993
Plasma treatment method and apparatus
HITACHI LTD602 citations99
US4992136AFeb 12, 1991
Dry etching method
HITACHI LTD259 citations99
US4985114AJan 15, 1991
Dry etching by alternately etching and depositing
HITACHI LTD601 citations99
US4857137AAug 15, 1989
Process for surface treatment
HITACHI LTD520 citations99
US6129806AOct 10, 2000
Plasma processing apparatus and plasma processing method
HITACHI LTD92 citations98
US6136214AOct 24, 2000
Plasma processing method and apparatus
HITACHI LTD54 citations96
US5891252AApr 6, 1999
Plasma processing apparatus
HITACHI LTD60 citations96
US5499207AMar 12, 1996
Semiconductor memory device having improved isolation between electrodes, and process for fabricating the same
HITACHI LTD86 citations96
US5474650ADec 12, 1995
Method and apparatus for dry etching
HITACHI LTD39 citations96
US6902683B1Jun 7, 2005
Plasma processing apparatus and plasma processing method
HITACHI LTD29 citations92
US6842658B2Jan 11, 2005
Method of manufacturing a semiconductor device and manufacturing system
HITACHI LTD40 citations92
US6573190B1Jun 3, 2003
Dry etching device and dry etching method
HITACHI LTD19 citations92
US6551445B1Apr 22, 2003
Plasma processing system and method for manufacturing a semiconductor device by using the same
HITACHI LTD50 citations92
US6475918B1Nov 5, 2002
Plasma treatment apparatus and plasma treatment method
HITACHI LTD24 citations92
US6033481AMar 7, 2000
Plasma processing apparatus
HITACHI LTD41 citations92
US5736449AApr 7, 1998
Semiconductor memory device having improved isolation between electrodes, and process for fabricating the same
HITACHI LTD17 citations92
US5643473AJul 1, 1997
Dry etching method
HITACHI LTD21 citations92
US5343353AAug 30, 1994
Semiconductor device and process of producing the same
HITACHI LTD27 citations92
US5147500ASep 15, 1992
Dry etching method
HITACHI LTD32 citations92
US4986877AJan 22, 1991
Method of dry etching
HITACHI LTD37 citations92
US4943344AJul 24, 1990
Etching method
HITACHI LTD41 citations92
US4911812AMar 27, 1990
Plasma treating method and apparatus therefor
HITACHI LTD47 citations90
US4956043ASep 11, 1990
Dry etching apparatus
HITACHI LTD46 citations89
US6629538B2Oct 7, 2003
Method for cleaning semiconductor wafers in a vacuum environment
HITACHI LTD14 citations84
US6506687B1Jan 14, 2003
Dry etching device and method of producing semiconductor devices
HITACHI LTD18 citations84
US6562722B2May 13, 2003
Method and apparatus for dry etching
HITACHI LTD11 citations82
US5318667AJun 7, 1994
Method and apparatus for dry etching
HITACHI LTD18 citations82
US4406733ASep 27, 1983
Dry etching method
HITACHI LTD20 citations82
US6713401B2Mar 30, 2004
Method for manufacturing semiconductor device
HITACHI LTD12 citations74
US6643893B2Nov 11, 2003
Apparatus for cleaning semiconductor wafers in a vacuum environment
HITACHI LTD10 citations74
US6511608B1Jan 28, 2003
Plasma processing method
HITACHI LTD8 citations74
US6333273B1Dec 25, 2001
Method and apparatus for dry etching
HITACHI LTD6 citations74
US6136721AOct 24, 2000
Method and apparatus for dry etching
HITACHI LTD7 citations74
US6008133ADec 28, 1999
Method and apparatus for dry etching
HITACHI LTD6 citations74
US5795832AAug 18, 1998
Method and apparatus for dry etching
HITACHI LTD5 citations74
US5705029AJan 6, 1998
Dry etching method
HITACHI LTD13 citations74
US5650038AJul 22, 1997
Method for dry etching
HITACHI LTD6 citations74
US5409562AApr 25, 1995
Dry-etching method and apparatus
HITACHI LTD13 citations74
US5354418AOct 11, 1994
Method for dry etching
HITACHI LTD8 citations74
US6579154B2Jun 17, 2003
Dry chemical-mechanical polishing method
HITACHI LTD3 citations63
US7071114B2Jul 4, 2006
Method and apparatus for dry etching
HITACHI LTD0 citations52