Inventor
MISE NOBUYUKI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “MISE NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS5242539ASep 7, 1993
Plasma treatment method and apparatus
HITACHI LTD602 citations99
US6759253B2Jul 6, 2004
Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units
HITACHI LTD27 citations92
US6967109B2Nov 22, 2005
Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units
HITACHI LTD6 citations74
US6656752B1Dec 2, 2003
Ion current density measuring method and instrument, and semiconductor device manufacturing method
HITACHI LTD5 citations62
SEIKO EPSON CORP
3 patentsUS7645655B2Jan 12, 2010
Semiconductor device and manufacturing method of the semiconductor device
SEIKO EPSON CORP7 citations72
US7968396B2Jun 28, 2011
Semiconductor device and manufacturing method of the semiconductor device
SEIKO EPSON CORP5 citations61
US7947560B2May 24, 2011
Method of nickel disilicide formation and method of nickel disilicate source/drain formation
SEIKO EPSON CORP2 citations61
HITACHI HIGH TECH CORP
3 patentsUS6835665B2Dec 28, 2004
Etching method of hardly-etched material and semiconductor fabricating method and apparatus using the method
HITACHI HIGH TECH CORP5 citations63
US11417892B2Aug 16, 2022
Fuel cell
HITACHI HIGH TECH CORP0 citations62
US11855318B2Dec 26, 2023
Fuel battery cell, fuel battery system, leak detection method
HITACHI HIGH TECH CORP0 citations51