Inventor

WANG YUI

TW2 patents

Patents

2 patents

US7390753B2Jun 24, 2008

In-situ plasma treatment of advanced resists in fine pattern definition

TAIWAN SEMICONDUCTOR MFG9 citations82

US6864174B2Mar 8, 2005

Iteratively selective gas flow control and dynamic database to achieve CD uniformity

TAIWAN SEMICONDUCTOR MFG7 citations63