Inventor · disambiguated record

Li-Shung Chen

Also filed as: CHEN LI-SHUNG

1 granted patent·7 citations·filing 2003–2003

29Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG1

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1 record

0150US6864174B2Iteratively selective gas flow control and dynamic database to achieve CD uniformityTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Mar 8, 2005·7 cites·16 claims

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Li-Shung Chen — Patent Inventor | PatentIndex