Inventor · disambiguated record

Sylvain Dutartre

Also filed as: DUTARTRE SYLVAIN

1 granted patent·2 citations·filing 2009–2009

18Inventor score

Technology areasG03F

Files withKLAASSEN MICHEL FRANSOIS HUBERT1

Top patents by PatentIndex Score

1 record

0155US8704199B2Alignment of collector device in lithographic apparatusKLAASSEN MICHEL FRANSOIS HUBERT·Filed 2009·Granted Apr 22, 2014·2 cites·19 claims

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