Inventor
CHANG TAIN-SHANG
TW4 patents
Patents
4 patentsUS11158659B2Oct 26, 2021
Semiconductor device structure with anti-acid layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations53
US9449922B2Sep 20, 2016
Contact critical dimension control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9299607B2Mar 29, 2016
Contact critical dimension control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9847296B2Dec 19, 2017
Barrier layer and structure method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40