Inventor
LAI CHIA-HAN
TW21 patents
⚠️ This page may combine multiple inventors who share the name “LAI CHIA-HAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
16 patentsUS10847411B2Nov 24, 2020
Conductive feature formation and structure
TAIWAN SEMICONDUCTOR MFG CO LTD12 citations84
US9653594B2May 16, 2017
Semiconductor device and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US9978583B2May 22, 2018
Opening fill process and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10475702B2Nov 12, 2019
Conductive feature formation and structure using bottom-up filling deposition
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11929314B2Mar 12, 2024
Interconnect structures including a fin structure and a metal cap
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11444028B2Sep 13, 2022
Contact structure and formation thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US9627313B2Apr 18, 2017
Opening fill process and structure formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12482705B2Nov 25, 2025
Conductive feature formation and structure using bottom-up filling deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11532503B2Dec 20, 2022
Conductive feature structure including a blocking region
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10943823B2Mar 9, 2021
Conductive feature formation and structure using bottom-up filling deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10804140B2Oct 13, 2020
Interconnect formation and structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10510664B2Dec 17, 2019
Contact structure and formation thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9735107B2Aug 15, 2017
Contact structure and formation thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9449922B2Sep 20, 2016
Contact critical dimension control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9299607B2Mar 29, 2016
Contact critical dimension control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US12362198B2Jul 15, 2025
Interface tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
TAIWAN SEMICONDUCTOR MFG
4 patentsUS9287170B2Mar 15, 2016
Contact structure and formation thereof
TAIWAN SEMICONDUCTOR MFG8 citations83
US9245797B2Jan 26, 2016
Opening fill process and structure formed thereby
TAIWAN SEMICONDUCTOR MFG4 citations73
US9219009B2Dec 22, 2015
Method of integrated circuit fabrication
TAIWAN SEMICONDUCTOR MFG5 citations73
US8927418B1Jan 6, 2015
Systems and methods for reducing contact resistivity of semiconductor devices
TAIWAN SEMICONDUCTOR MFG5 citations73