Inventor
YU REN-HAU
TW5 patents
Patents
5 patentsUS10340192B2Jul 2, 2019
FinFET gate structure and method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82
US9824929B2Nov 21, 2017
FinFET gate structure and method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US10832959B2Nov 10, 2020
FinFET gate structure and method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9449922B2Sep 20, 2016
Contact critical dimension control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9299607B2Mar 29, 2016
Contact critical dimension control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48