Inventor
POIS HEATH A
US11 patents
⚠️ This page may combine multiple inventors who share the name “POIS HEATH A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVA MEASURING INSTR INC
6 patentsUS10859519B2Dec 8, 2020
Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS)
NOVA MEASURING INSTR INC3 citations83
US10481112B2Nov 19, 2019
Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)
NOVA MEASURING INSTR INC4 citations83
US10119925B2Nov 6, 2018
Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)
NOVA MEASURING INSTR INC7 citations83
US11029148B2Jun 8, 2021
Feed-forward of multi-layer and multi-process information using XPS and XRF technologies
NOVA MEASURING INSTR INC2 citations69
US10648802B2May 12, 2020
Feed-forward of multi-layer and multi-process information using XPS and XRF technologies
NOVA MEASURING INSTR INC2 citations69
US11852467B2Dec 26, 2023
Method and system for monitoring deposition process
NOVA MEASURING INSTR INC0 citations45
POIS HEATH A
3 patentsUS9588066B2Mar 7, 2017
Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)
POIS HEATH A44 citations96
US9952166B2Apr 24, 2018
Silicon germanium thickness and composition determination using combined XPS and XRF technologies
POIS HEATH A3 citations71
US9594035B2Mar 14, 2017
Silicon germanium thickness and composition determination using combined XPS and XRF technologies
POIS HEATH A3 citations71