Inventor
TOTH MILOS
AU28 patents
⚠️ This page may combine multiple inventors who share the name “TOTH MILOS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FEI CO
15 patentsUS7541580B2Jun 2, 2009
Detector for charged particle beam instrument
FEI CO15 citations83
US8357894B2Jan 22, 2013
Microcalorimetry for X-ray spectroscopy
FEI CO18 citations81
US12061159B2Aug 13, 2024
Particle-induced x-ray emission (PIXE) using hydrogen and multi-species focused ion beams
FEI CO2 citations68
US10538844B2Jan 21, 2020
Nanofabrication using a new class of electron beam induced surface processing techniques
FEI CO3 citations68
US11152189B2Oct 19, 2021
Method and system for plasma assisted low vacuum charged-particle microscopy
FEI CO4 citations66
US7791020B2Sep 7, 2010
Multistage gas cascade amplifier
FEI CO4 citations61
US9123506B2Sep 1, 2015
Electron beam-induced etching
FEI CO3 citations58
US11377740B2Jul 5, 2022
Nanofabrication using a new class of electron beam induced surface processing techniques
FEI CO0 citations57
US9951417B2Apr 24, 2018
Method of depositing material
FEI CO0 citations49
US9812286B2Nov 7, 2017
Localized, in-vacuum modification of small structures
FEI CO0 citations49
US10304658B2May 28, 2019
Electron beam-induced etching
FEI CO0 citations48
US9633816B2Apr 25, 2017
Electron beam microscope with improved imaging gas and method of use
FEI CO0 citations48
US10777383B2Sep 15, 2020
Method for alignment of a light beam to a charged particle beam
FEI CO0 citations45
US10501851B2Dec 10, 2019
Attachment of nano-objects to beam-deposited structures
FEI CO0 citations45
US9799490B2Oct 24, 2017
Charged particle beam processing using process gas and cooled surface
FEI CO1 citations43
TOTH MILOS
6 patentsUS8524139B2Sep 3, 2013
Gas-assisted laser ablation
TOTH MILOS27 citations91
US8921811B2Dec 30, 2014
High pressure charged particle beam system
TOTH MILOS7 citations82
US8617668B2Dec 31, 2013
Method of using nitrogen based compounds to reduce contamination in beam-induced thin film deposition
TOTH MILOS11 citations82
US8598542B2Dec 3, 2013
Charged particle beam processing
TOTH MILOS5 citations71
US8303833B2Nov 6, 2012
High resolution plasma etch
TOTH MILOS3 citations62
US8299432B2Oct 30, 2012
Scanning transmission electron microscope using gas amplification
TOTH MILOS4 citations56
STRAW MARCUS
4 patentsUS8168961B2May 1, 2012
Charged particle beam masking for laser ablation micromachining
STRAW MARCUS20 citations90
US8629416B2Jan 14, 2014
Charged particle beam masking for laser ablation micromachining
STRAW MARCUS5 citations82
US10493559B2Dec 3, 2019
Method and apparatus for laser machining
STRAW MARCUS10 citations80
US8853592B2Oct 7, 2014
Method for laser machining a sample having a crystalline structure
STRAW MARCUS2 citations61