Inventor
VANDERPOT JOHN W
US20 patents
⚠️ This page may combine multiple inventors who share the name “VANDERPOT JOHN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
9 patentsUS7135691B2Nov 14, 2006
Reciprocating drive for scanning a workpiece through an ion beam
AXCELIS TECH INC36 citations92
US6777687B2Aug 17, 2004
Substrate positioning system
AXCELIS TECH INC23 citations92
US7547899B2Jun 16, 2009
Charged beam dump and particle attractor
AXCELIS TECH INC12 citations84
US7323695B2Jan 29, 2008
Reciprocating drive for scanning a workpiece
AXCELIS TECH INC11 citations84
US7141809B2Nov 28, 2006
Method for reciprocating a workpiece through an ion beam
AXCELIS TECH INC12 citations84
US7547898B2Jun 16, 2009
Particulate prevention in ion implantation
AXCELIS TECH INC2 citations63
US7381977B2Jun 3, 2008
Ion beam profiler
AXCELIS TECH INC6 citations63
US7579604B2Aug 25, 2009
Beam stop and beam tuning methods
AXCELIS TECH INC0 citations52
US6921907B2Jul 26, 2005
Substrate positioning system
AXCELIS TECH INC1 citations52