Inventor

POLLOCK JOHN D

US23 patents

⚠️ This page may combine multiple inventors who share the name “POLLOCK JOHN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

POLLOCK JOHN D

AXCELIS TECH INC

Reciprocating drive for scanning a workpiece through an ion beam

Substrate positioning system

Reciprocating drive for scanning a workpiece

Method for reciprocating a workpiece through an ion beam

Ion beam profiler

Substrate positioning system

ADVANCED ION BEAM TECH INC

Implant method and implanter by using a variable aperture

Ion implanter and ion implant method thereof

Method for low temperature ion implantation

NOVELLUS SYSTEMS INC

Microfeature wafer handling apparatus and methods

Method and apparatus for flowing gases into a manifold at high potential

POLLOCK JOHN D

Method for low temperature ion implantation

Method for low temperature ion implantation

ECLIPSE ION TECHNOLOGY INC

Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment

TOKYO ELECTRON LTD

Method and apparatus for inverting samples in a process

ADVANCED ION BEAM TECHNOLOGY I

Apparatus and method for reducing implant angle variations across a large wafer for a batch disk

VARIAN ASSOCIATES

Method and apparatus for improved ion dose accuracy

PROTEROS LLC

Compact load lock system for ion beam processing of foups

NOVELLUS SYTEMS INC

Encapsulated thermofoil heater apparatus and associated methods

VARIAH SEMICONDUCTOR EQUIPMENT

Hybrid scanning system and methods for ion implantation

CHRISTIANSON GEORGE

Method of preparing fire retardant insulation

WAN ZHIMIN

Implant method and implanter by using a variable aperture

VEECO INSTR INC

Rotating disk reactor with ferrofluid seal for chemical vapor deposition