Inventor

HIGGINS CRAIG D

US2 patents

Patents

2 patents

US10782606B2Sep 22, 2020

Photolithography methods and structures that reduce stochastic defects

GLOBALFOUNDRIES INC1 citations59

US10353288B2Jul 16, 2019

Litho-litho-etch double patterning method

GLOBALFOUNDRIES INC0 citations35