Inventor

BERRIAN DONALD W

US20 patents

⚠️ This page may combine multiple inventors who share the name “BERRIAN DONALD W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BERRIAN DONALD W

AXCELIS TECH INC

Reciprocating drive for scanning a workpiece through an ion beam

Substrate positioning system

Reciprocating drive for scanning a workpiece

Method for reciprocating a workpiece through an ion beam

Particulate prevention in ion implantation

Ion beam profiler

Substrate positioning system

VARIAN ASSOCIATES

Ion beam scanning method and apparatus

Method and apparatus for high efficiency scanning in an ion implanter

Pattern data handling system for an electron beam exposure system

NOVELLUS SYSTEMS INC

Methods and apparatus for measuring temperatures at high potential

Method and apparatus for flowing gases into a manifold at high potential

APPLIED MATERIALS INC

System and method for uniformly implanting a wafer with an ion beam

System and method for implanting a wafer with an ion beam

SENSITECH INC

Disposable electronic monitor device

VARIAN SEMICONDUCTOR EQUIPMENT

High efficiency scanning in ion implanters

PROTEROS LLC

Ion implantation uniformity correction using beam current control

BERRIAN DONALD W

Disposable electronic monitor device

VARIAH SEMICONDUCTOR EQUIPMENT

Hybrid scanning system and methods for ion implantation

AXCELLIS TECHNOLOGIES INC

System and method for rapidly controlling the output of an ion source for ion implantation