Inventor
Tang mark
US3 patents
Patents
3 patentsUS10953539B2Mar 23, 2021
Substrate transfer robot and automatic teaching method
KAWASAKI HEAVY IND LTD4 citations69
US10381257B2Aug 13, 2019
Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction
KAWASAKI HEAVY IND LTD1 citations61
US10867821B2Dec 15, 2020
Substrate transfer robot and method of teaching edge position of target body
KAWASAKI HEAVY IND LTD0 citations37