Inventor
KOHL PAUL ALBERT
US2 patents
Patents
2 patentsUS6610593B2Aug 26, 2003
Fabrication of semiconductor device with air gaps for ultra low capacitance interconnections and methods of making same
GEORGIA TECH RES INST56 citations90
US6888249B2May 3, 2005
Fabrication of semiconductor devices with air gaps for ultra low capacitance interconnections and methods of making same
GEORGIA TECH RES INST9 citations67