Inventor

UESONO GOU

JP2 patents

Patents

2 patents

US9755022B2Sep 5, 2017

Epitaxial silicon wafer having reduced stacking faults

SUMCO CORP4 citations68

US9425264B2Aug 23, 2016

Method for growing an epitaxial film on a phosphorous-doped silicon wafer

SUMCO CORP4 citations68