Inventor

RAY ANDY M

US2 patents

Patents

2 patents

US10483086B2Nov 19, 2019

Beam profiling speed enhancement for scanned beam implanters

AXCELIS TECH INC2 citations68

US9711329B2Jul 18, 2017

System and method to improve productivity of hybrid scan ion beam implanters

AXCELIS TECH INC0 citations34