Inventor
CHOI WOO HYUNG
KR6 patents
⚠️ This page may combine multiple inventors who share the name “CHOI WOO HYUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADAPTIVE PLASMA TECH CORP
4 patentsUS11538702B2Dec 27, 2022
Apparatus for monitoring an exchanging process of a semiconductor part and a method for the same
ADAPTIVE PLASMA TECH CORP0 citations58
US11315764B2Apr 26, 2022
Structure variable type of a plasma source coil and a method for controlling the same
ADAPTIVE PLASMA TECH CORP0 citations58
US12293933B2May 6, 2025
Electrostatic chuck with multiple heater zones
ADAPTIVE PLASMA TECH CORP0 citations48
US11841284B2Dec 12, 2023
Particle trapping apparatus for preventing an error of a pressure measurement
ADAPTIVE PLASMA TECH CORP0 citations39