Inventor
HSIEH IAN
TW7 patents
⚠️ This page may combine multiple inventors who share the name “HSIEH IAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS11211232B2Dec 28, 2021
Methods for cleaning semiconductor device manufacturing apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12154813B2Nov 26, 2024
Electrostatic chuck sidewall gas curtain
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11521884B2Dec 6, 2022
Electrostatic chuck sidewall gas curtain
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12551934B2Feb 17, 2026
Semiconductor cleaning apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12420314B2Sep 23, 2025
Semiconductor cleaning apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60