Inventor
CHEN WEN-JU
TW13 patents
⚠️ This page may combine multiple inventors who share the name “CHEN WEN-JU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS11855185B2Dec 26, 2023
Multilayer masking layer and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11728173B2Aug 15, 2023
Masking layer with post treatment
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11530479B2Dec 20, 2022
Atomic layer deposition tool and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12543335B2Feb 3, 2026
Multilayer masking layer and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12414353B2Sep 9, 2025
Method for forming semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12328929B2Jun 10, 2025
Method of forming thin dummy sidewall spacers for transistors with reduced pitches
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12087641B2Sep 10, 2024
Method for forming semiconductor structure with fins using a multilayer mask structure for etching to form nanostructures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11145746B2Oct 12, 2021
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12575355B2Mar 10, 2026
Masking layer with post treatment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61