P

Inventor

LOEBACH ERNST

LI6 patents
⚠️ This page may combine multiple inventors who share the name “LOEBACH ERNST”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PERKIN ELMER CENSOR

3 patents
US4540277ASep 10, 1985

Device for the projection printing of masks into a workpiece

PERKIN ELMER CENSOR139 citations93
US4621922ANov 11, 1986

Device for the projection copying of masks onto a workpiece

PERKIN ELMER CENSOR6 citations60
US4619524AOct 28, 1986

Device for the projection copying of masks

PERKIN ELMER CENSOR3 citations60

TABARELLI WERNER

1 patent
US5146284ASep 8, 1992

Interferometer gas flow system

TABARELLI WERNER43 citations90

LOEBACH ERNST

1 patent
US5284054AFeb 8, 1994

Method and apparatus for preparing a gas mixture for purposes of analysis and application of the method

LOEBACH ERNST49 citations87

CENSOR PATENT VERSUCH

1 patent
US4379831AApr 12, 1983

Process for transferring a pattern onto a semiconductor disk

CENSOR PATENT VERSUCH7 citations71