Inventor
AUBELE KARL-EUGEN
DE17 patents
⚠️ This page may combine multiple inventors who share the name “AUBELE KARL-EUGEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS STIFTUNG
5 patentsUS4769763ASep 6, 1988
Control for coordinate measuring instruments
ZEISS STIFTUNG212 citations97
US5526576AJun 18, 1996
Coordinate measurement machine having a probe head and an electronic system for processing probe signals
ZEISS STIFTUNG176 citations94
US5018280AMay 28, 1991
Method and device for the operation of a workpiece-contacting probe head of the switching type
ZEISS STIFTUNG25 citations91
US4785545ANov 22, 1988
Means for simultaneously connecting a plurality of switch-type probe heads to the measurement arm of a coordinate-measuring machine
ZEISS STIFTUNG11 citations73
US4758720AJul 19, 1988
Method and means for measuring guidance errors at one or more points along the length of a displacement-measuring system
ZEISS STIFTUNG15 citations71
ZEISS CARL SMT AG
5 patentsUS7304717B2Dec 4, 2007
Imaging device in a projection exposure facility
ZEISS CARL SMT AG12 citations91
US7486382B2Feb 3, 2009
Imaging device in a projection exposure machine
ZEISS CARL SMT AG8 citations82
US7791826B2Sep 7, 2010
Optical assembly
ZEISS CARL SMT AG6 citations73
US7710542B2May 4, 2010
Imaging device in a projection exposure machine
ZEISS CARL SMT AG7 citations72
US7684131B2Mar 23, 2010
Method and a device for positioning an element in an optical system
ZEISS CARL SMT AG0 citations51
ZEISS CARL SMT GMBH
3 patentsUS7961294B2Jun 14, 2011
Imaging device in a projection exposure facility
ZEISS CARL SMT GMBH6 citations72
US7929227B2Apr 19, 2011
Optical assembly
ZEISS CARL SMT GMBH4 citations62
US8879046B2Nov 4, 2014
Method for moving an optical element of a projection exposure apparatus for microlithography
ZEISS CARL SMT GMBH3 citations55