Inventor
NAKANO MASATAKE
JP19 patents
⚠️ This page may combine multiple inventors who share the name “NAKANO MASATAKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU HANDOTAI KK
16 patentsUS6596610B1Jul 22, 2003
Method for reclaiming delaminated wafer and reclaimed delaminated wafer
SHINETSU HANDOTAI KK108 citations97
US6004866ADec 21, 1999
Method for manufacturing bonded wafer and bonded wafer manufactured thereby
SHINETSU HANDOTAI KK73 citations96
US6900113B2May 31, 2005
Method for producing bonded wafer and bonded wafer
SHINETSU HANDOTAI KK21 citations92
US6720640B2Apr 13, 2004
Method for reclaiming delaminated wafer and reclaimed delaminated wafer
SHINETSU HANDOTAI KK25 citations92
US6239004B1May 29, 2001
Method of forming oxide film on an SOI layer and method of fabricating a bonded wafer
SHINETSU HANDOTAI KK30 citations92
US5427052AJun 27, 1995
Method and apparatus for production of extremely thin SOI film substrate
SHINETSU HANDOTAI KK36 citations92
US5376215ADec 27, 1994
Apparatus for production of extremely thin SOI film substrate
SHINETSU HANDOTAI KK23 citations92
US5240883AAug 31, 1993
Method of fabricating soi substrate with uniform thin silicon film
SHINETSU HANDOTAI KK25 citations91
US7186628B2Mar 6, 2007
Method of manufacturing an SOI wafer where COP's are eliminated within the base wafer
SHINETSU HANDOTAI KK18 citations84
US6959854B2Nov 1, 2005
Production method for bonded substrates
SHINETSU HANDOTAI KK17 citations84
US7531425B2May 12, 2009
Method of fabricating bonded wafer
SHINETSU HANDOTAI KK10 citations82
US6797632B1Sep 28, 2004
Bonded wafer producing method and bonded wafer
SHINETSU HANDOTAI KK15 citations82
US6534384B2Mar 18, 2003
Method for manufacturing SOI wafer including heat treatment in an oxidizing atmosphere
SHINETSU HANDOTAI KK16 citations81
US11056381B2Jul 6, 2021
Method for producing bonded SOI wafer
SHINETSU HANDOTAI KK3 citations72
US10460983B2Oct 29, 2019
Method for manufacturing a bonded SOI wafer
SHINETSU HANDOTAI KK2 citations70
US10424484B2Sep 24, 2019
Method for manufacturing a bonded SOI wafer
SHINETSU HANDOTAI KK0 citations41