Inventor

FRANKA JOHN G

US3 patents

Patents

3 patents

US4428975AJan 31, 1984

Process for improving nitride deposition on a semiconductor wafer

MOTOROLA INC28 citations89

US5351419AOct 4, 1994

Method for vapor drying

MOTOROLA INC24 citations83

US5024972AJun 18, 1991

Deposition of a conductive layer for contacts

MOTOROLA INC4 citations57