Inventor
DEPINTO GARY A
US3 patents
Patents
3 patentsUSH1701HJan 6, 1998
Method and apparatus for using molten aluminum to abate PFC gases from a semiconductor facility
MOTOROLA INC22 citations85
US5351419AOct 4, 1994
Method for vapor drying
MOTOROLA INC24 citations83
US5024972AJun 18, 1991
Deposition of a conductive layer for contacts
MOTOROLA INC4 citations57