Inventor
BARRY JOHN D
US3 patents
⚠️ This page may combine multiple inventors who share the name “BARRY JOHN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV MARYLAND
2 patentsUS8052908B2Nov 8, 2011
Photolithographic mask exhibiting enhanced light transmission due to utilizing sub-wavelength aperture arrays for imaging patterns in nano-lithography
UNIV MARYLAND8 citations81
US8054450B2Nov 8, 2011
Stepper system for ultra-high resolution photolithography using photolithographic mask exhibiting enhanced light transmission due to utilizing sub-wavelength aperture arrays
UNIV MARYLAND6 citations70