Inventor

KAUFMAN VLASTA BRUSIC

US21 patents

⚠️ This page may combine multiple inventors who share the name “KAUFMAN VLASTA BRUSIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KAUFMAN VLASTA BRUSIC

CABOT MICROELECTRONICS CORP

Chemical mechanical polishing slurry useful for copper/tantalum substrates

Chemical mechanical polishing slurry useful for copper substrates

Chemical mechanical polishing method useful for copper substrates

Chemical mechanical polishing slurry useful for copper substrates

Chemical mechanical polishing slurry useful for copper substrates

Chemical mechanical polishing systems and methods for their use

Method of polishing using multi-oxidizer slurry

Method of polishing a multi-layer substrate

Polishing system with stopping compound and method of its use

Method of polishing a multi-layer substrate

Chemical mechanical polishing slurry useful for copper substrates

Chemical mechanical polishing method useful for copper substrates

Chemical mechanical polishing slurry useful for copper substrates

Chemical mechanical polishing slurry useful for copper substrates

CABOT CORP

Chemical mechanical polishing slurry useful for copper/tantalum substrate

Chemical mechanical polishing slurry useful for copper substrates

Multi-oxidizer slurry for chemical mechanical polishing

Chemical mechanical polishing slurry for metal layers and films

Multi-oxidizer precursor for chemical mechanical polishing

Multi-oxidizer slurry for chemical mechanical polishing

WANG SHUMIN

Chemical mechanical polishing systems and methods for their use