Inventor
OOKI HIROSHI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “OOKI HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
14 patentsUS5764363AJun 9, 1998
Apparatus for observing a surface using polarized light
NIKON CORP137 citations97
US5739898AApr 14, 1998
Exposure method and apparatus
NIKON CORP150 citations96
US5851707ADec 22, 1998
Microlithography projection-exposure masks, and methods and apparatus employing same
NIKON CORP22 citations92
US5847812ADec 8, 1998
Projection exposure system and method
NIKON CORP33 citations92
US6693704B1Feb 17, 2004
Wave surface aberration measurement device, wave surface aberration measurement method, and projection lens fabricated by the device and the method
NIKON CORP31 citations91
US5621532AApr 15, 1997
Laser scanning microscope utilizing detection of a far-field diffraction pattern with 2-dimensional detection
NIKON CORP50 citations91
US6291145B1Sep 18, 2001
Image formation method with photosensitive material
NIKON CORP29 citations90
US6583928B2Jun 24, 2003
Microscope
NIKON CORP13 citations80
US5902716AMay 11, 1999
Exposure method and apparatus
NIKON CORP16 citations74
US10578973B2Mar 3, 2020
Illumination optical assembly, exposure apparatus, and device manufacturing method
NIKON CORP2 citations73
US6400502B1Jun 4, 2002
Microscope
NIKON CORP12 citations73
US5636201AJun 3, 1997
Optical disk memory for recording reproducible information
NIKON CORP10 citations73
US5694220ADec 2, 1997
Minute step measuring method
NIKON CORP6 citations62
US9513560B2Dec 6, 2016
Illumination optical assembly, exposure apparatus, and device manufacturing method
NIKON CORP0 citations52