Inventor
HAYASHI KAZUICHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “HAYASHI KAZUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS8038835B2Oct 18, 2011
Processing device, electrode, electrode plate, and processing method
TOKYO ELECTRON LTD529 citations95
US6368450B2Apr 9, 2002
Processing apparatus
TOKYO ELECTRON LTD60 citations95
US6149729ANov 21, 2000
Film forming apparatus and method
TOKYO ELECTRON LTD34 citations92
US5942282AAug 24, 1999
Method for depositing a titanium film
TOKYO ELECTRON LTD36 citations92
US5879139AMar 9, 1999
Vacuum pump with gas heating
TOKYO ELECTRON LTD41 citations92
US6156107ADec 5, 2000
Trap apparatus
TOKYO ELECTRON LTD55 citations91
US5904757AMay 18, 1999
Trap apparatus
TOKYO ELECTRON LTD48 citations91
US6253029B1Jun 26, 2001
Vacuum processing apparatus
TOKYO ELECTRON LTD5 citations73
US8003535B2Aug 23, 2011
Semiconductor device manufacturing method and target substrate processing system
TOKYO ELECTRON LTD2 citations62